extreme ultraviolet lithography

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• Extreme ultraviolet lithography — (also known as EUV or EUVL ) is a next generation lithography technology using the 13.5 nm EUV wavelength. EUVL opticsEUVL is a significant departure from the deep ultraviolet lithography used today. All matter absorbs EUV radiation. Hence, EUV… …   Wikipedia

• Extreme ultraviolet — Extreme Ultra Violet radiation (EUV) is generally considered to be the part of the electromagnetic spectrum spanning from 120 nm down to 10 nm. Its main uses are photoelectron spectroscopy, solar imaging, and lithography. EUV is naturally… …   Wikipedia

• Ultraviolet — UV redirects here. For other uses, see UV (disambiguation). UVB redirects here. For the mysterious shortwave radio station in Russia, see UVB 76. For other uses, see Ultraviolet (disambiguation). False color image of the Sun s corona as seen in… …   Wikipedia

• Lithography — Charles Marion Russell s The Custer Fight (1903). Note the range of tones, fading toward the edges …   Wikipedia

• Computational lithography — (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the resolution attainable through photolithography. Computational lithography has come to the forefront of photolithography in 2008 as …   Wikipedia

• X-ray lithography — is a next generation lithography that has been developed for the semiconductor industryref|vlad. Batches of microprocessors have already been produced. The short wavelengths of 0.8 nm X rays overcome diffraction limits in the resolution of… …   Wikipedia

• Electron beam lithography — (often abbreviated as e beam lithography) is the practice of scanning a beam of electrons in a patterned fashion across a surface covered with a film (called the resist),cite book |last= McCord |first=M. A. |coauthors=M. J. Rooks |title=… …   Wikipedia

• Next-generation lithography — (NGL) is a term used in integrated circuit manufacturing to describe the lithography technologies slated to replace photolithography. As of 2009 the most advanced form of photolithography is immersion lithography, in which water is used as an… …   Wikipedia

• Nanoimprint lithography — is a method of fabricating nanometer scale patterns. It is a simple nanolithography process with low cost, high throughput and high resolution. It creates patterns by mechanical deformation of imprint resist and subsequent processes. The imprint… …   Wikipedia

• Photolithography — For earlier uses of photolithography in printing, see Lithography. For the same process applied to metal, see Photochemical machining. Photolithography (or optical lithography ) is a process used in microfabrication to selectively remove parts of …   Wikipedia

• EUV-Lithografie — (auch kurz EUVL) ist ein Fotolithografie Verfahren, das elektromagnetische Strahlung mit einer Wellenlänge von 13,5 nm (91,82 eV) nutzt, sogenannte extrem ultraviolette Strahlung (englisch extreme ultra violet, EUV). Dies soll es… …   Deutsch Wikipedia